The Chips Act has set aside approximately $54 million for research projects for measurement services, tools, and instrumentation; innovative manufacturing metrologies; novel assurance and provenance technologies and advanced metrology R&D testbeds.
In September 2022, the US National Institute of Standards and Technology (NIST) published a 
“This funding opportunity dedicated to CHIPS Metrology will help give small businesses the opportunity to take innovative ideas, scale them for the commercial marketplace, and boost the U.S. economy,” says NIST director and US under-secretary of commerce Laurie Locascio.
Funded activities are expected to include, but not necessarily be limited to compact, fieldable cryogenic technologies, compact extreme ultraviolet (EUV) sources, and the seven grand challenges.
This funding opportunity is provided through the Small Business Innovation Research (SBIR) Program, the federal government’s largest platform to promote U.S. technology innovation research and private-sector commercialization. NIST is one of eleven federal government agencies that operate an SBIR program.
More at: CHIPS Metrology Program and the seven grand challenges.